Facilitating Integration of Electron Beam Lithography Devices With Interactive Videodisc, Computer-Based Simulation and Job Aids
Title
Facilitating Integration of Electron Beam Lithography Devices With Interactive Videodisc, Computer-Based Simulation and Job Aids
Date
1990
Publisher
New York Institute of Technology
Subject
Interactive video.
Lithography, Electron beam.
Lithography, Electron beam.
Language
English
Format
PDF
Type
Text
Files
Citation
Linn, Robert Christopher von der, Facilitating Integration of Electron Beam Lithography Devices With Interactive Videodisc, Computer-Based Simulation and Job Aids . New York Tech Institutional Repository, accessed October 10, 2026, https://repository.nyitlibrary.org/items/show/2146
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